Inertial angular sensor with micro-machined electromechanical microsystem

An inertial angular sensor with a micro-machined electromechanical microsystem comprising:

• a support plate;
• an inner mass suspended at fixed anchoring points of the support plate and adapted to vibrate in a plane substantially parallel to the support plate;
• an outer mass enclosing the inner mass, coupled to the inner mass and adapted to vibrate in the plane substantially parallel to the support plate;
• an external frame arranged above the support plate relative to an axis, perpendicular to the plane and enclosing the inner mass and the outer mass;
• wherein the angular sensor further comprises an internal frame arranged between the outer mass and the external frame and fixed to the support plate by an electrically insulating element, the outer mass being suspended at fixed anchoring points of the internal frame and being electrically connected to the internal frame by first suspension elements.