US 2026/0298619 A1Published application

System and method for inspection and metrology of three-dimensional features

AssigneeOrbotech Ltd.

InventorNir Turko

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Abstract

The system includes a stage that holds a workpiece, a first light source that emits light, a first beam splitter that directs a first portion of the light onto the workpiece and a second portion of the light along a reference path, a refractive optical element that spatially modulates the light in the reference path, a second beam splitter that combines the light from the refractive optical element and the light reflected by the workpiece, and a first detector that generates a first detection signal based on the combined light received from the second beam splitter as the stage scans relative to the first detector. A processor is configured to generate a plurality of interference images of the workpiece based on the first detection signal, and determine a relative height of each pixel of the workpiece based on an interference contrast between corresponding pixels of the plurality of interference images.

Claims20

Dependent claims

A system comprising:

a stage configured to hold a workpiece;
a first light source configured to emit light;
a first beam splitter configured to direct a first portion of the light onto the workpiece and a second portion of the light along a reference path;
a refractive optical element disposed in the reference path and configured to spatially modulate the light in the reference path, wherein the refractive optical element has a varying refractive index profile;
a second beam splitter configured to combine the light from the refractive optical element and the light reflected by the workpiece;
a first detector configured to generate a first detection signal based on the combined light received from the second beam splitter as the stage scans relative to the first detector;
and
a processor in electronic communication with the first detector, wherein the processor is configured to:
receive the first detection signal from the first detector;
generate a plurality of interference images of the workpiece based on the first detection signal;
and
determine a relative height of each pixel of the workpiece based on an interference contrast between corresponding pixels of the plurality of interference images.

9 more elements

A method comprising:

emitting light from a first light source;
directing, with a first beam splitter, a first portion of the light from the first light source onto a workpiece and a second portion of the light from the first light source along a reference path;
spatially modulating, with a refractive optical element, the light from the first light source in the reference path, wherein the refractive optical element has a varying refractive index profile;
combining, with a second beam splitter, the light from first light source refracted by the refractive optical element and the light from the first light source reflected by the workpiece;
generating, with a first detector, a first detection signal based on the combined light from the first light source received from the second beam splitter as the stage scans relative to the first detector;
generating, with a processor, a plurality of interference images of the workpiece based on the first detection signal received from the first detector;
and
determining, with the processor, a relative height of each pixel of the workpiece based on an interference contrast between corresponding pixels of the plurality of interference images.

5 more elements

Dependencies are inferred from the claim text.