Chromatic point sensor measuring apparatus

A chromatic point sensor (CPS) measuring apparatus comprising:

• a chromatic point sensor (CPS) probe that optically acquires distance information to a workpiece;
• a measuring apparatus main body that moves the CPS probe installed in a probe head relatively to the workpiece;
• and a computer that processes detection signals from the CPS probe to calculate workpiece shape information,
• wherein the CPS probe is provided to:
• have an aperture that passes through light from a CPS light source, and a chromatic aberration optical element that converts the light that passed through the aperture into focused light having axial chromatic aberration to emit the focused light toward the workpiece, and form a measurement spot of wavelength depending on a distance to the workpiece on a workpiece surface that is positioned within a range of axial chromatic aberration of the focused light;
• condense reflected light of the measurement spot with the chromatic aberration optical element and focus the reflected light at the aperture, and then guide the reflected light to a CPS detector such that the CPS detector outputs detection signals;
• and
• irradiate illumination light from a light source for observation to an illumination area on the workpiece surface with the chromatic aberration optical element, and guide reflected light of the illumination area to a camera for observation via the chromatic aberration optical element, and
• the computer has a function that displays a mark at a position of the measurement spot on an observation image acquired by the camera for observation.