Interference observation device and interference observation method
AssigneeHamamatsu Photonics K.K.
InventorsToyohiko YAMAUCHI, Natsuki SUZUKI
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AssigneeHamamatsu Photonics K.K.
InventorsToyohiko YAMAUCHI, Natsuki SUZUKI
Estimating the term…
An interference observation device includes a light source; an interference optical system that includes a reference mirror, splits light output from the light source into a first light and a second light, and outputs interference light between the first light reflected by an observation object and the second light reflected by the reference mirror; an image sensor that detects the interference light; and a processing unit that acquires an interference image. The interference optical system includes a mechanism configured to change a focal condition of an optical path of the second light. The processing unit separates observation surface information and non-observation surface information based on a plurality of the interference images obtained when the focal condition of the optical path of the second light is changed in a state in which a focal point of the first light is aligned with an observation surface of the observation object.
An interference observation device, comprising:
An interference observation method, comprising:
Dependencies are inferred from the claim text.