Method for driving laser light source and laser interferometer
AssigneeSeiko Epson Corporation
InventorsNobuhito HAYASHI, Kohei YAMADA
Life of this patent
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Abstract
A method for driving a laser light source provided in a laser interferometer configured to measure displacement of a object, the laser interferometer including the laser light source configured to output pulse laser light, an optical frequency modulator configured to modulate an optical frequency of the pulse laser light to generate reference light, and a photodetector configured to receive object light generated when the object is irradiated with the pulse laser light and the reference light, and output a light reception signal, the method including setting a pulse width of the pulse laser light based on a first optical path length from the laser light source to the object.
Claims14
A method for driving a laser light source provided in a laser interferometer,
- the laser interferometer including
- the laser light source configured to output pulse laser light,
- an optical frequency modulator configured to modulate an optical frequency of the pulse laser light to generate reference light, and
- a photodetector configured to receive object light generated when an object is irradiated with the pulse laser light and the reference light, and output a light reception signal,
- the method comprising setting a pulse width of the pulse laser light based on a first optical path length from the laser light source to the object.
A laser interferometer comprising:
- a laser light source configured to output pulse laser light;
- an optical frequency modulator configured to modulate an optical frequency of the pulse laser light to generate reference light;
- a photodetector configured to receive object light generated when an object is irradiated with the pulse laser light and the reference light, and output a light reception signal;
- a demodulator configured to demodulate the light reception signal to extract information derived from the object;
- and
- a light source driver configured to set a pulse width of the pulse laser light based on a first optical path length from the laser light source to the object, and drive the laser light source.
Dependencies are inferred from the claim text.