Cooling apparatus, substrate processing apparatus and a method for cooling a processing liquid

A cooling apparatus to cool and output a processing liquid, the cooling apparatus comprising:

• a cooling medium output part which outputs the cooling medium;
• a heat exchanger which cools the processing liquid through heat exchange with the cooling medium;
• a supply flow path former which forms a cooling medium supply flow path for causing the cooling medium to circulate between the cooling medium output part and the heat exchanger;
• a bypass flow path former which forms a bypass flow path for returning the cooling medium output from the cooling medium output part to the cooling medium output part without passing the cooling medium through the heat exchanger;
• a temperature detector which detects the temperature of the processing liquid output from the heat exchanger;
• and
• a controller which controls the temperature of the processing liquid to be output from the heat exchanger by regulating a flow rate ratio of the cooling medium to flow in each of the cooling medium supply flow path and the bypass flow path on a basis of detection result from the temperature detector.