Cooling apparatus and substrate processing apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorsTomoaki AIHARA, Tetsuya WATANABE
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Abstract
A cooling apparatus according to the present invention includes a plurality of coolers each of which reduces a temperature of the processing liquid and a pipe along which the coolers are connected in series with each other, and a dew condensation management part which is configured to conduct independent dew condensation management on each of a plurality of blocks into which the flow path former is divided. It is possible to conduct the dew condensation management on each of the blocks of the flow path former including the plurality of coolers and the pipe. This allows the dew condensation management to be conducted effectively on the apparatus as a whole.
Claims11
A cooling apparatus to cool and output a processing liquid, the cooling apparatus comprising:
- a flow path former which forms a flow path of the processing liquid, the flow path former including a plurality of coolers each of which reduces a temperature of the processing liquid and a pipe along which the coolers are connected in series with each other;
- and
- a dew condensation management part which is configured to conduct independent dew condensation management on each of a plurality of blocks into which the flow path former is divided.
Dependencies are inferred from the claim text.