Modifying Crystal Growth Processes Based on Predicted In Situ Parameters
AssigneeWolfspeed, Inc.
InventorsSteven Herbert Griffiths, Caleb Andrew Kent, Ramya Lakshmi Gurunathan, Michael Anthony Fusco, Matthew David Conrad, David Aries Deininger
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Abstract
An example method includes obtaining, during a crystal growth process of a crystalline material, one or more ex situ parameters of a crystal growth system associated with the crystal growth process. The example method includes determining, based at least in part on the one or more ex situ parameters, a predicted in situ parameter. The example method includes adjusting, based at least in part on the predicted in situ parameter, one or more process parameters of the crystal growth process.
Claims20
A method comprising:
- obtaining, during a crystal growth process of a crystalline material, one or more ex situ parameters of a crystal growth system associated with the crystal growth process;
- determining, based at least in part on the one or more ex situ parameters, a predicted in situ parameter;
- and
- adjusting, based at least in part on the predicted in situ parameter, one or more process parameters of the crystal growth process.
A system, the system comprising:
- processing circuitry configured to perform operations, the operations comprising:
- obtaining, during a crystal growth process of a crystalline material, one or more ex situ parameters of a crystal growth system associated with the crystal growth process;
- determining, based at least in part on the one or more ex situ parameters, a predicted in situ parameter;
- and
- adjusting, based at least in part on the predicted in situ parameter, one or more process parameters of the crystal growth process.
Dependencies are inferred from the claim text.