Anodizing apparatus and anodizing method therefor
AssigneeToyota Jidosha Kabushiki Kaisha
InventorsMasaaki NISHIYAMA, Hiroshi YANAGIMOTO
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AssigneeToyota Jidosha Kabushiki Kaisha
InventorsMasaaki NISHIYAMA, Hiroshi YANAGIMOTO
Estimating the term…
Provided is an anodizing apparatus and an anodizing method therefor capable of efficiently forming an anodic oxide film on a treatment surface of a substrate by using an electrolyte membrane. An anodizing apparatus is an apparatus that applies voltage between a cathode and a substrate to perform an anodizing process on the treatment surface of the substrate. The anodizing apparatus includes a container having an opening covered by an electrolyte membrane; a cathode disposed inside of the container; a power supply that applies voltage between the cathode and the substrate; and a mount base on which the substrate is placed. The electrolyte membrane has a contact region that contacts the substrate and a peripheral region that faces the mount base so as to surround the contact region. A surface of the mount base facing the peripheral region is made of insulating material.
An anodizing apparatus that applies voltage between an cathode and a substrate to perform an anodizing process on a treatment surface of the substrate, the anodizing apparatus comprising:
Dependencies are inferred from the claim text.