Composition containing an organosilane compounds, methods of manufacturing thin films and thin film-coated substrates, transfer method, thin film-coated substrate, and article

A composition comprising a silane compound 1 having formula (1), wherein, as calculated from area percentages in gas chromatography, a content of the silane compound 1 is 99.0% or higher, a content of a silane compound 2 having formula (2) is less than 0.05%, a content of a silane compound 3 having formula (3) is less than 0.80%, and a content of a silane compound 5 having formula (5) is less than 0.05%:

• wherein R1 to R4 represent the same or different hydrocarbon groups having 1 to 10 carbon atoms, a and b represent the same or different integers of 0 to 3, a+b is an integer of 5 or less, and R5 represents a hydrocarbon group having 1 to 6 carbon atoms;
• wherein c and d represent the same or different integers of 0 to 3, the sum of c and d is greater than the sum of a and b in formula (1);
• wherein R6 to R9 represent the same or different hydrocarbon groups having 1 to 10 carbon atoms, and a′ and b′ represent the same or different integers from 0 to 3;
• wherein R15 to R18 and R20 to R23 represent the same or different hydrocarbon groups having 1 to 10 carbon atoms, g and n represent the same or different integers of 0 to 3, h and m represent the same or different integers of 0 to 2, and R19 and R24 represent the same or different hydrocarbon groups having 1 to 6 carbon atoms.