Collecting apparatus and collecting method

Abstract

The embodiments of the present invention relate to a collecting apparatus for collecting a precursor from exhaust gas discharged from a processing apparatus using the precursor. The collecting apparatus may comprise a first collector which is equipped with: a cooling part which has a first refrigerant passing therethrough so as to enable cooling and recovering exhaust gas; and an inner space which is connected to a processing apparatus and is controllable by means of vacuum pressure. Thus, according to the embodiments of the present invention, a precursor may be effectively collected from the exhaust gas discharged from the processing apparatus. That is, collecting efficiency for the precursor collected from the exhaust gas may be improved. Thus, the amount of the precursor that is discarded may be reduced. In addition, the collected precursor may be reused in the processing apparatus, and thus costs arising from the precursor may be reduced.

Dependencies are inferred from the claim text.