Gas supply line arrangements

A method of operating a gas supply line arrangement for a substrate process chamber, the method comprising:

• providing a first gas source for a first cycle of the substrate process chamber;
• providing a second gas source for a second cycle of the substrate process chamber;
• connecting a gas supply line to carry the first gas and the second gas towards the substrate process chamber;
• connecting a three-port valve into the gas supply line arrangement, the three-port valve comprising;
• a valve inlet connectable to the gas supply line,
• a first valve outlet in fluid communication with the substrate process chamber and operable to admit or prevent a passage of the first gas to the substrate process chamber, and
• a second valve outlet connectable to a divert line and operable to admit or prevent a passage of particle-containing second gas to the divert line;
• connecting the three-port valve to the divert line;
• and
• discharging the particle-containing second gas into the divert line during the second cycle.

A tangible machine-readable medium including instructions which, when read by a machine, cause the machine to perform operations in a method of operating a gas supply line arrangement for a substrate process chamber, the method comprising:

• opening or closing a first gas source for a first cycle of the substrate process chamber;
• opening or closing a second gas source for a second cycle of the substrate process chamber;
• controlling a connected gas supply line carrying the first gas and the second gas towards the substrate process chamber;
• and
• controlling actuators of a three-port valve connected to the gas supply line, the three-port valve comprising:
• a valve inlet in fluid communication with the gas supply line;
• a first valve outlet in fluid communication with the substrate process chamber, the first valve outlet operable to admit or prevent a passage of the first gas to the substrate process chamber;
• and
• a second valve outlet connectable to a divert line and operable to admit or prevent a passage of particle-containing second gas to the divert line;
• and sending a signal to one of the actuators of the three-port valve to open the second valve outlet to discharge the particle-containing second gas into the divert line during the second cycle.