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US 2026/0297722 A1Published application
Deposition mask, method of manufacturing the same, and electronic device manufactured by using the same
AssigneeSamsung Display Co., Ltd.
InventorsIl Sup KIM, Su Bin BAE, In Soo PARK
Life of this patent
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Abstract
A deposition mask includes a mask substrate provided with a cell opening, and a membrane disposed on the mask substrate. The membrane has recesses each including a flat portion and exposed through the cell opening, and pixel openings are defined through the flat portions of the recesses. Each of the recesses has a width greater than a width of a corresponding one of the pixel openings.
Claims20
A deposition mask comprising:
- a mask substrate provided with a cell opening;
- and
- a membrane disposed on the mask substrate,
- wherein the membrane has recesses each comprising a flat portion and exposed through the cell opening,
- pixel openings are defined through the flat portion of each of the recesses, and
- each of the recesses has a width greater than a width of a corresponding one of the pixel openings.
3 more elements
A method of manufacturing a deposition mask, the method comprising:
- forming a membrane on a mask substrate;
- forming recesses, which are recessed from a surface of the membrane adjacent to the mask substrate, and pixel openings penetrating the recesses by patterning the membrane;
- and
- forming a cell opening exposing the recesses by patterning the mask substrate,
- wherein each of the recesses is formed to have a width greater than a width of a corresponding one the pixel openings.
2 more elements
An electronic device comprising a display panel,
- wherein the display panel comprises a backplane substrate and a plurality of light emitting layers formed on the backplane substrate by using a deposition mask,
- the deposition mask comprises a mask substrate provided with a cell opening and a membrane disposed on the mask substrate,
- the membrane comprises recesses each having a flat portion and exposed through the cell opening,
- pixel openings are defined through the flat portion of each of the recesses,
- each of the recesses has a width greater than a width of a corresponding one of the pixel openings, and
- the light emitting layers are formed by a deposition process which provides a deposition material through the cell opening, the recesses, and the pixel openings.
3 more elements
Dependencies are inferred from the claim text.