Surface treatment liquid, and surface treatment method

Abstract

To provide a surface treatment liquid capable of satisfactorily hydrophobizing a surface of a substrate, which is for use for a surface treatment of the substrate, and a surface treatment method in which the surface of the substrate is treated using the surface treatment liquid. A surface treatment liquid for use for a hydrophobization treatment of a substrate includes a silylation agent and a solvent. The solvent contains water and propylene glycol monoalkyl ether acetate, and contains propylene glycol monoalkyl ether and/or propylene glycol monoacetate. A ratio of the mass of the silylation agent to the mass of the surface treatment liquid, a ratio of the mass of the propylene glycol monoalkyl ether acetate to the mass of the surface treatment liquid, a ratio of the masses/mass of the propylene glycol monoalkyl ether and/or the propylene glycol monoacetate to the mass of the surface treatment liquid, and a ratio of the mass of water to the mass of the surface treatment liquid are each set within a specific range.

Dependencies are inferred from the claim text.