Glass-ceramic substrates having improved mechanical durability and microelectronic articles including same

Abstract

A glass-ceramic substrate includes a crystalline phase, a residual glass phase, greater than or equal to 50 mol % and less than or equal to 80 mol % SiO2, greater than or equal to 1 mol % and less than or equal to 20 mol % Al2O3, greater than or equal to 0 mol % and less than or equal to 10 mol % TiO2, greater than or equal to 0 mol % and less than or equal to 5 mol % ZrO2, and greater than or equal to 0 mol % and less than or equal to 3 mol % P2O5. TiO2+ZrO2+P2O5 is greater than 0 mol % and less than or equal to 13 mol %. The glass-ceramic substrate comprises a fracture toughness greater than or equal to 0.75 MPa·m1/2.

Dependencies are inferred from the claim text.