Wet bench system and method for grabbing batch of wafers in processing solution

A method comprising:

• transferring a batch of wafers by using a wafer transfer robot of a wet bench system to a position above a first processing apparatus of the wet bench system;
• loading the batch of wafers, by using the wafer transfer robot, to a first batch wafer carrier of the first processing apparatus;
• lowering the first batch wafer carrier with the batch of wafers into a processing solution stored in a processing chamber of the first processing apparatus;
• clamping the batch of wafers immersed in the processing solution by using a gripping assembly;
• and
• grabbing the gripping assembly with the batch of wafers out of the processing solution.

A wet bench system comprising:

• a first processing apparatus comprising:
• a housing defining a processing chamber;
• and
• a batch wafer carrier movable in the housing and comprising a frame configured to support a wafer;
• a wafer transfer robot configured to transfer the wafer onto the batch wafer carrier;
• and
• a gripping assembly configured to clamp the wafer from the batch wafer carrier, wherein the gripping assembly comprises a pair of gripping arms coupled by a rotating shaft, the gripping arms each has a handle and an arm portion on opposite sides of the rotating shaft, the arm portion has a plurality of slots, and a pitch of the slots is substantially the same as a pitch of grooves of the batch wafer carrier.