Piezoelectric device and liquid ejection head
AssigneeSeiko Epson Corporation
InventorsMisaki ADACHI, Shiro YAZAKI, Takatoshi YAMAZAKI
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AssigneeSeiko Epson Corporation
InventorsMisaki ADACHI, Shiro YAZAKI, Takatoshi YAMAZAKI
Estimating the term…
A piezoelectric device includes a vibrating plate coupled to a first substrate and partitioning a space with the first substrate, and a piezoelectric element having a first electrode, a piezoelectric layer, and a second electrode laminated in this order along a first direction from the vibrating plate toward the first substrate. When viewed in the first direction, a region where the space and the vibrating plate overlap is an overlapping region, and a region where a partition wall of the first substrate and the vibrating plate overlap is a non-overlapping region. An arm region where the piezoelectric layer is not provided extends from part of the overlapping region to part of the non-overlapping region. A first stress relieving portion is provided in the arm region along a second direction intersecting a longitudinal direction of the arm region.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.