Piezoelectric device and liquid discharge head
AssigneeSeiko Epson Corporation
InventorsShiro YAZAKI, Misaki ADACHI, Takatoshi YAMAZAKI
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AssigneeSeiko Epson Corporation
InventorsShiro YAZAKI, Misaki ADACHI, Takatoshi YAMAZAKI
Estimating the term…
A piezoelectric device includes a diaphragm coupled to a pressure chamber substrate to partition part of a pressure chamber, and a piezoelectric element in which a lower electrode, a piezoelectric layer, and an upper electrode are stacked on the diaphragm along a stacking direction on a side opposite to the pressure chamber. The diaphragm vibrates in response to driving of the piezoelectric element. When a region where the pressure chamber and the diaphragm overlap in the stacking direction is defined as a flexible region in a width direction intersecting the stacking direction, the flexible region includes an active region where the diaphragm and the electrodes and piezoelectric layer overlap. An inflection point of the diaphragm deflection when the piezoelectric element is not driven is located in the flexible region outside the active region.
A piezoelectric device comprising:
A piezoelectric device comprising:
Dependencies are inferred from the claim text.