US 2026/0295632 A1 · THIN FILM FLATTENING MODULE AND METHOD OF FORMING THIN FILM

Abstract

A flattening module and a method of forming a thin film are disclosed. The flattening module includes a frame including a frame body extending from a first end in a longitudinal direction to a second end, and a mount forming an outer face of the frame body. A first electrode includes a first electrode hub adjacent to the first end of the frame body, and a plurality of first electrode segments extending from the first electrode hub in the longitudinal direction. A second electrode includes a second electrode hub adjacent to the second end of the frame body and a plurality of second electrode segments extending from the second electrode hub in the longitudinal direction. The plurality of first electrode segments and the plurality of second electrode segments are alternately arranged along a perimeter of the mount and are spaced apart from each other.

Claims20

Dependent claims

A flattening module, comprising:

a frame, including:
a frame body extending from a first end to a second end in a longitudinal direction;
and
a mount forming an outer face of the frame body;
a first electrode, including:
a first electrode hub adjacent to the first end of the frame body;
and
a plurality of first electrode segments extending from the first electrode hub in the longitudinal direction;
and
a second electrode, including:
a second electrode hub adjacent to the second end of the frame body;
and
a plurality of second electrode segments extending from the second electrode hub in the longitudinal direction,
wherein first electrode segments of the plurality of first electrode segments and second electrode segments of the plurality of second electrode segments are alternately arranged along a perimeter of the mount and are spaced apart from each other.

11 more elements

An electronic device, comprising:

a flattening module;
and
an electrode power supply configured to provide an electric power to the flattening module,
wherein the flattening module includes:
a frame, including:
a frame body extending from a first end in a longitudinal direction to a second end;
and
a mount forming an outer face of the frame body;
a frame driver configured to provide a rotational force to the frame;
a first electrode, including:
a first electrode hub adjacent to the first end of the frame body;
and
a plurality of first electrode segments extending from the first electrode hub in the longitudinal direction;
and
a second electrode, including:
a second electrode hub adjacent to the second end of the frame body;
and
a plurality of second electrode segments extending from the second electrode hub in the longitudinal direction,
wherein first electrode segments of the plurality of first electrode segments and second electrode segments of the plurality of second electrode segments are alternately arranged along a perimeter of the mount and are spaced apart from each other.

16 more elements

A method of forming a thin film, the method comprising:

moving a fluid application unit forward and applying a film layer to an upper face of a substrate;
and
moving a flattening module, forming an electric flux above the film layer, forward while the flattening module rotates and flattens the film layer.

Dependencies are inferred from the claim text.

Thin film flattening module and method of forming thin film

Life of this patent

Thin film flattening module and method of forming thin film

Life of this patent

Abstract

Claims20