Sample holder, analysis system, and method for analyzing sample
AssigneeKioxia Corporation
InventorsRisa MORIYAMA, Jiahong WU
Life of this patent
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AssigneeKioxia Corporation
InventorsRisa MORIYAMA, Jiahong WU
Estimating the term…
A sample holder includes a sample chamber, a laser guide, a first introduction pipe, and a delivery pipe. The sample chamber includes a surface having a through hole and configured to accommodate a sample along the surface. The laser guide extends in a first direction crossing the surface of the sample chamber between a first end connected to the through hole and a second end opposite to the first end. A window capable of transmitting a laser beam is provided at the second end of the laser guide. The first introduction pipe is provided on a first side of the sample chamber to introduce a carrier gas into the sample chamber. The delivery pipe is provided on a second side of the sample chamber to deliver a substance released from the sample by application of the laser beam.
A sample holder comprising:
A method for analyzing a sample, comprising:
Dependencies are inferred from the claim text.