Liquid material vaporizing device
AssigneeHORIBA STEC, Co., Ltd.
InventorsKeisuke NISHIWAKI, Ichiro NISHIKAWA, Kenichi AMIMOTO, Soichiro HIRAI
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Abstract
The present invention vaporizes a liquid material while preventing metal elution, and includes a main body block having a mixing portion that mixes a liquid material and a carrier gas, a liquid material supply pipe that supplies the liquid material to the main body block, a gas-liquid mixture lead-out pipe that leads out the gas-liquid mixture from the main body block, and a heating unit that heats the gas-liquid mixture lead-out pipe, in which the main body block is formed of ceramics or plastic, the liquid material supply pipe is formed of ceramics or plastic, and the gas-liquid mixture lead-out pipe is formed of ceramics.
Claims12
A liquid material vaporizing device, comprising:
- a main body block that mixes a liquid material and a carrier gas,
- a liquid material supply pipe that supplies the liquid material to the main body block,
- a gas-liquid mixture lead-out pipe that leads out the gas-liquid mixture from the main body block, and
- a heating unit that heats the gas-liquid mixture lead-out pipe, wherein
- the main body block is formed of ceramics or plastic,
- the liquid material supply pipe is formed of ceramics or plastic, and
- the gas-liquid mixture lead-out pipe is formed of ceramics.
A liquid material vaporizing device, comprising:
- a main body block to which a liquid material is supplied;
- a control valve that is provided in the main body block and adjusts a flow rate of the liquid material;
- a liquid material supply pipe that supplies the liquid material to the main body block;
- a liquid material lead-out pipe that leads out the liquid material from the main body block;
- and
- a heating unit that heats the liquid material lead-out pipe, wherein
- the main body block is formed of ceramics or plastic,
- the liquid material supply pipe is formed of ceramics or plastic, and
- the liquid material lead-out pipe is formed of ceramics.
Dependencies are inferred from the claim text.