Multilevel semiconductor device and structure with oxide bonding
AssigneeMonolithic 3D Inc.
InventorsZvi Or-Bach, Deepak C. Sekar, Brian Cronquist
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Abstract
A multi-level semiconductor device, the device including: a first level including a substrate; a second level including at least one photo detector, where the second level is disposed above the first level, and where the substrate includes at least one interconnect layer; an oxide layer disposed between the first level and the second level; at least one read out circuit, where the second level is bonded to the oxide layer; and a control circuit.
Claims20
A multi-level semiconductor device, the device comprising:
- a first level comprising a substrate;
- a second level comprising at least one photo detector,
- wherein said second level is disposed above said first level, and
- wherein said substrate comprises at least one interconnect layer;
- an oxide layer disposed between said first level and said second level;
- at least one read out circuit,
- wherein said second level is bonded to said oxide layer;
- and
- a control circuit.
A multi-level semiconductor device, the device comprising:
- a first level comprising a substrate;
- a second level comprising at least one optical modulator,
- wherein said second level is disposed above said first level,
- wherein said substrate comprises at least one interconnect layer;
- an oxide layer disposed between said first level and said second level;
- at least one read out circuit,
- wherein said second level is bonded to said oxide layer;
- and
- a control circuit.
A multi-level semiconductor device, the device comprising:
- a first level comprising substrate;
- a second level comprising at least one structure capable to couple to optical fiber,
- wherein said second level is disposed above said first level,
- wherein said substrate comprises at least one interconnect layer;
- an oxide layer disposed between said first level and said second level;
- at least one read out circuit,
- wherein said second level is bonded to said oxide layer;
- and
- a control circuit.
Dependencies are inferred from the claim text.