Method for manufacturing semiconductor device
AssigneeResonac Corporation
InventorsChiharu KOGA, Tomoaki SHIBATA, Seiji KAI
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AssigneeResonac Corporation
InventorsChiharu KOGA, Tomoaki SHIBATA, Seiji KAI
Estimating the term…
Hybrid bonding in Chip on Wafer (CoW) which is a three-dimensional integration technology of semiconductors is disclosed. In this method, an organic insulation material M is applied so as to cover redistribution wiring on substrate bodies 101 and 201 to form organic insulation layers 102 and 202. A semiconductor wafer 100 is heated to set the curing rate of the organic insulation layer 102 to 30% or more. The curing rate of the semiconductor wafer 200 is suppressed to 85% or less. The cured semiconductor wafer 100 is singulated to obtain a semiconductor chip 10. The semiconductor chip 10 is mounted on the semiconductor wafer 200 by a chip bonder CB. A bonded body S is reheated to fully cure the organic insulation layer. In this manufacturing method, shear strength can be increased in the hybrid bonding using the organic insulation layer.
A method for manufacturing a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.