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US 2026/0293604 A1Published application
Laminate, method for manufacturing laminate, and method for manufacturing semiconductor device
AssigneeToray Industries, Inc.
InventorsTakenori FUJIWARA, Yukari ARIMOTO, Kenta AOSHIMA
Life of this patent
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Abstract
The present invention relates to a laminate in which a laser-absorbing temporary adhesive layer 1, a protective layer 1, and a semiconductor layer 1 are laminated in this order on a laser-transmissive substrate 1.
Claims19
A laminate comprising:
- a laser-transmitting substrate 1;
- and
- a laser-absorbing temporary adhesive layer 1, a protective layer 1, and a semiconductor layer 1 laminated in this order on the laser-transmitting substrate 1.
A method for producing a laminate, successively comprising:
- a step (I) of using a laminate 1, in which a laser-absorbing temporary adhesive layer 1, a protective layer 1, and a semiconductor layer 1 are laminated in this order on a laser-transmitting substrate 1, and a laminate 2, in which a pressure-sensitive adhesive layer is laminated on a support substrate 2, to cause a surface of the laminate 1 on a semiconductor layer 1 side and a surface of the laminate 2 on a pressure-sensitive adhesive layer side to face each other;
- and
- a step (II) of irradiating the laser-absorbing temporary adhesive layer 1 with a laser from a surface side of the laminate 1 opposite to the surface thereof on the semiconductor layer 1 side while transmitting the laser through the laser-transmitting substrate 1, and transferring a structure 1 in which the protective layer 1 and the semiconductor layer 1 are laminated to the laminate 2 to form a laminate 3 in which the pressure-sensitive adhesive layer, the semiconductor layer 1, and the protective layer 1 are laminated in this order on the support substrate 2.
A laminate comprising:
- a support substrate 2, a pressure-sensitive adhesive layer, a semiconductor layer 1, and a protective layer 1 laminated in this order, wherein
- the pressure-sensitive adhesive layer has a patterned shape.
Dependencies are inferred from the claim text.