Carrier for edge passivation
AssigneeSingulus Technologies AG
InventorFrank MAY
Life of this patent
Estimating the term…
Abstract
The present invention relates in general to a carrier for edge passivation of semiconductor devices and, more specifically, to a storage insert for receiving a stack of a plurality of wafers or semiconductor devices, a carrier for a plurality of such storage inserts, and a method for loading such a carrier.
Claims23
A storage insert for receiving a stack of a plurality of wafers, the storage insert comprising:
- two opposing side walls;
- a bottom plate slidably mounted relative to the side walls for storing the stack of the plurality of wafers;
- and
- a restoring mechanism which is adapted to exert an upward-directed restoring force on the bottom plate parallel to the side walls.
(canceled)
6-15. (canceled)
A carrier for one or more horizontally aligned wafer stacks, wherein the carrier has a frame and one or more compartments for a respective horizontally aligned wafer stack, wherein each compartment is delimited by at least one web and/or wherein the plurality of compartments are each separated from one another by webs, and wherein a horizontally aligned wafer stack is received in at least one of the compartments such that the wafers in the compartment are vertically aligned and arranged parallel to the web or the webs.
(canceled)
Dependencies are inferred from the claim text.