Substrate processing apparatus and substrate processing method
AssigneeSCREEN Holdings Co., Ltd.
InventorsKeita ISEKI, Hiroyuki YASHIKI, Hajime NISHIDE, Ken TERAI
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Abstract
A substrate processing chamber of the present invention includes a housing, a plate-shaped partition wall that partitions the housing, and a first processing chamber and a second processing chamber formed by partitioning the housing by the partition wall, and includes an auxiliary robot that conveys a substrate between the first processing chamber and the second processing chamber via a passage port provided in the partition wall, and the auxiliary robot is provided in either the first processing chamber or the second processing chamber.
Claims13
A substrate processing apparatus including a substrate processing chamber configured to process a substrate in a horizontal attitude, the substrate processing apparatus comprising
- a center robot configured to transfer the substrate to and from the substrate processing chamber,
- wherein
- the substrate processing chamber includes:
- a housing;
- a plate-shaped partition wall configured to partition the housing;
- a first processing chamber formed by partitioning the housing by the partition wall;
- a second processing chamber formed by partitioning the housing by the partition wall;
- a first processing unit provided in the first processing chamber and configured to perform first processing on the substrate;
- a second processing unit provided in the second processing chamber and configured to perform second processing different from the first processing on the substrate;
- a passage port provided in the partition wall and configured to allow a substrate to pass through;
- and
- an auxiliary robot configured to convey the substrate between the first processing chamber and the second processing chamber via the passage port, and
- the auxiliary robot is provided in either the first processing chamber or the second processing chamber.
A substrate processing method of processing a substrate in a horizontal attitude, the substrate processing method comprising:
- a substrate transfer process in which a center robot transfers the substrate to an auxiliary robot;
- a first conveyance process in which the auxiliary robot conveys the substrate to a first processing unit;
- a first processing process in which the substrate is subjected to first processing;
- a second conveyance process in which the auxiliary robot conveys the substrate to a second processing unit;
- a second processing process in which the substrate is subjected to second processing;
- and
- a carry-out process in which the center robot carries the substrate subjected to the second processing out of the second processing unit.
Dependencies are inferred from the claim text.