Separation apparatus, separation system, and separation method

A separation system, comprising:

• a separation apparatus configured to separate a combined substrate, in which a first substrate and a second substrate are bonded, into the first substrate and the substrate;
• and
• a substrate transfer device configured to carry the combined substrate into the separation apparatus and carry out each of the separated first substrate and the separated second substrate from the separation apparatus,
• wherein the separation apparatus comprises:
• a first holder configured to hold the first substrate of the combined substrate;
• a second holder configured to hold the second substrate of the combined substrate;
• a separation guide configured to be advanced between the first substrate and the second substrate of the combined substrate to form a separation start portion where separation begins;
• and
• a gas ejector configured to eject a gas between the first substrate and the second substrate of the combined substrate, and
• the gas ejector changes at least one of an ejection position, an ejection direction, or an ejection amount as an ejection state of the gas after the separation start portion is formed by the separation guide and the gas is ejected.

A separation method of separating a combined substrate, in which a first substrate and a second substrate are bonded, into the first substrate and the second substrate, the separation method comprising:

• holding the first substrate of the combined substrate with a first holder;
• holding the second substrate of the combined substrate with a second holder;
• forming a separation start portion, where separation begins, by advancing a separation guide between the first substrate and the second substrate of the combined substrate;
• and
• allowing the separation to progress by separating the first substrate from the second substrate, starting from the separation start portion,
• wherein in the allowing of the separation to progress, a gas is ejected between the first substrate and the second substrate of the combined substrate from a gas ejector, and at least one of an ejection position, an ejection direction, or an ejection amount is changed as an ejection state of the gas.