Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsKoji OHASHI, Nobuaki ITO, Yasuaki HAMADA, Masao NAKAYAMA
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Abstract
A piezoelectric element includes, in this order in a stacking direction: a lower electrode; a lower piezoelectric body containing K, Na, and Nb; an upper piezoelectric body containing K, Na, and Nb; and an upper electrode, wherein K1/(K1+Na1)<K2/(K2+Na2) is satisfied, where K1 is an average concentration of K in the lower piezoelectric body, Na1 is an average concentration of Na in the lower piezoelectric body, K2 is an average concentration of K in the upper piezoelectric body, and Na2 is an average concentration of Na in the upper piezoelectric body.
Claims14
A piezoelectric element comprising, in this order in a stacking direction:
- a lower electrode;
- a lower piezoelectric body containing K, Na, and Nb;
- an upper piezoelectric body containing K, Na, and Nb;
- and
- an upper electrode, wherein
- K1/(K1+Na1)<K2/(K2+Na2) is satisfied, where
- K1 is an average concentration of K in the lower piezoelectric body,
- Na1 is an average concentration of Na in the lower piezoelectric body,
- K2 is an average concentration of K in the upper piezoelectric body, and
- Na2 is an average concentration of Na in the upper piezoelectric body.
Dependencies are inferred from the claim text.