Photoelectric conversion device

A photoelectric conversion device comprising:

• a substrate having a first surface and a second surface that is a surface on a side opposite to the first surface and is a light incident surface,
• wherein a plurality of pixels are arranged on the substrate,
• the plurality of pixels each have a plurality of photoelectric conversion units,
• between the plurality of photoelectric conversion units included in one pixel of the plurality of pixels, a first trench extending from the second surface toward the first surface is arranged,
• between the plurality of pixels, a second trench extending from the first surface toward the second surface is arranged,
• in a plan view of the substrate, the first trench and the second trench have an intersecting portion where the first trench and the second trench intersect with each other,
• the first trench is separated from the first surface, and
• an end portion on the second surface side of the second trench in the intersecting portion is positioned on the first surface side relative to an end portion on the second surface side of the second trench in a non-intersecting portion where the first trench and the second trench do not intersect in the plan view.

A photoelectric conversion device comprising:

• a substrate having a first surface and a second surface that is a surface on a side opposite to the first surface and is a light incident surface,
• wherein a plurality of pixels are arranged on the substrate,
• the plurality of pixels each have a plurality of photoelectric conversion units,
• between the plurality of photoelectric conversion units included in one pixel of the plurality of pixels, a first trench extending from the second surface toward the first surface is arranged,
• between the plurality of pixels, a second trench extending from the first surface toward the second surface is arranged,
• in a plan view of the substrate, the first trench and the second trench do not intersect, and a P-type diffusion layer is arranged between the first trench and the second trench, and
• the first trench is separated from the first surface.