Radiation hardened (rad-hard) devices including a superlattice reservoir layer and related methods

A radiation-hardened (rad-hard) electronic system comprising:

• a semiconductor layer having at least one active device region therein;
• a radiation passivation layer comprising
• a superlattice adjacent the at least one active device region, the superlattice comprising a plurality of stacked layer groups, each layer group comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions, and
• a passivating species in the superlattice configured to release therefrom to passivate radiation-induced defects in the at least one active device region;
• and
• a heater thermally coupled to the radiation passivation layer and configured to selectively heat the superlattice to release the passivating species therefrom.