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US 2026/0293237 A1Published application
Semiconductor device including an organic film covering a projecting structure
AssigneeRohm Co., Ltd.
InventorYuki NAKANO
Life of this patent
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Abstract
A semiconductor device includes a chip which has a first main surface on one side and a second main surface on the other side and which includes an active surface set at an inner portion of the first main surface and an outside surface set at a peripheral edge portion of the first main surface, a functional device which is formed at the active surface side, a projecting structure which includes an inorganic substance and projects at the outside surface side, and an organic film which covers the projecting structure.
Claims20
A semiconductor device comprising:
- a chip which has a first main surface on one side and a second main surface on the other side and which includes an active surface set at an inner portion of the first main surface and an outside surface set at a peripheral edge portion of the first main surface;
- a functional device which is formed at the active surface side;
- a mesa portion which is constituted of a portion of the chip and formed at the outside surface such as to project toward the opposite side of the second main surface;
- a first inorganic film which covers at least a portion of the mesa portion;
- a second inorganic film which covers at least a portion of the first inorganic film and forms a projecting structure with the mesa portion and the first inorganic film;
- and
- an organic film which covers at least the second inorganic film.
4 more elements
A semiconductor device comprising:
- a chip which has a first main surface on one side and a second main surface on the other side and which includes an active surface set at an inner portion of the first main surface and an outside surface set at a peripheral edge portion of the first main surface;
- a functional device which is formed at the active surface side;
- a mesa portion which is constituted of a portion of the chip and formed at the outside surface such as to project toward the opposite side of the second main surface;
- a first inorganic film which covers at least a portion of the mesa portion;
- a second inorganic film which is formed on the outside surface at an interval from the first inorganic film such as to form a gap with the first inorganic film and forms a projecting structure with the mesa portion and the first inorganic film;
- and
- an organic film which fills the gap and covers the mesa portion, the first inorganic film and the second inorganic film.
4 more elements
Dependencies are inferred from the claim text.