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US 2026/0293209 A1Published application
Semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKen-Ichi GOTO, Gerben DOORNBOS, Georgios Vellianitis, Viraj Madhiwala, Sheng-Chih Lai
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Abstract
A semiconductor structure includes a metal gate disposed over a substrate, a high-k material layer disposed over the metal gate, an inter layer disposed over the high-k material layer, an oxide semiconductor layer disposed on the inter layer, and source and drain terminals adjacent to the oxide semiconductor layer. The inter layer has a Gibbs free energy higher than hafnium oxide.
Claims20
A semiconductor structure, comprising:
- a metal gate disposed over a substrate;
- a high-k material layer disposed over the metal gate;
- an inter layer disposed over the high-k material layer, wherein the inter layer has a Gibbs free energy higher than hafnium oxide;
- an oxide semiconductor layer disposed on the inter layer;
- and
- source and drain terminals adjacent to the oxide semiconductor layer.
3 more elements
A semiconductor structure, comprising:
- a first inter layer disposed over a substrate, wherein the first inter layer has a Gibbs free energy higher than hafnium oxide;
- an oxide semiconductor layer disposed on the first inter layer;
- a second inter layer disposed on the oxide semiconductor layer, wherein the second inter layer has a Gibbs free energy higher than hafnium oxide;
- a high-k material layer disposed over the second inter layer;
- a metal gate disposed over the high-k material layer;
- and
- source and drain terminals adjacent to the oxide semiconductor layer.
4 more elements
A semiconductor structure, comprising:
- a metal gate disposed over a substrate;
- a ferroelectric layer disposed over the metal gate;
- an inter layer disposed over the ferroelectric layer, wherein the inter layer has a Gibbs free energy higher than hafnium oxide;
- an oxide semiconductor layer disposed on the inter layer;
- and
- source and drain terminals adjacent to the oxide semiconductor layer.
3 more elements
Dependencies are inferred from the claim text.