Semiconductor device, semiconductor memory device, and method for manufacturing semiconductor device
AssigneeKioxia Corporation
InventorYusuke KASAHARA
Life of this patent
Estimating the term…
Loading patent…
AssigneeKioxia Corporation
InventorYusuke KASAHARA
Estimating the term…
A semiconductor device includes an oxide semiconductor layer between first and second electrodes in a first direction. The oxide semiconductor layer includes a first region facing a gate electrode, between a second region and a third region. A gate insulating layer is provided between the first region and the gate electrode. In a first cross section parallel to the first direction, a first length, which is a maximum length of the first region in a second direction, is greater than a second length, which is a minimum length of the second region in the second direction, and greater than a third length, which is a minimum length of the third region in the second direction. ½ of a difference between the first length and an average of the second and third lengths, is equal to or greater than 0.75 times a thickness of the gate insulating layer.
A semiconductor device comprising:
A method for manufacturing a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.