Photosensitive resin composition, resin film having pattern, method for producing resin film having pattern, and semiconductor circuit board

A photosensitive resin composition comprising:

• (A) a polymer that is at least one selected from the group consisting of a polyimide and a polyimide precursor;
• (B) a photopolymerization initiator;
• and
• (D) a solvent, wherein
• the polymer (A) comprises a structural unit (a) derived from an acid anhydride and a structural unit (b) derived from a diamine,
• the structural unit (a) comprises a structural unit (a1) derived from an acid anhydride represented by formula (1) below, and
• the polymer (A) has a group represented by formula (eg1) or (eg2) below or a maleimide group at at least one of a side chain terminal and a main chain terminal:
• in the formula (1),
• L's independently represent a single bond, an ester bond, or an amide bond,
• R1, R2, and R3 each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, or an alkylene group having 1 to 4 carbon atoms formed by bonding R1 and R2 or R1 and R3 in a same ring to each other,
• n1 and n2 each independently represent an integer of 0 to 3, provided that, in the same ring, at least one of n1 and n2 is an integer of 1 or more,
• Y1 represents a structure represented by formula (Y1) or (Y2) below:
• in the formulae (Y1) and (Y2), * represents a bond to L in the formula (1),
• Ar1 and Ar2 each independently represent an unsubstituted aromatic ring or a group obtained by removing two hydrogen atoms on an aromatic ring from an aromatic ring substituted with an alkyl group or an alkoxy group having 1 to 6 carbon atoms, and
• Y2 in the formula (Y2) is at least one group selected from the group consisting of a single bond, an oxygen atom, a sulfur atom, a sulfonyl group, a carbonyl group, a methylene group, a dimethylmethylene group, and a bis(trifluoromethyl)methylene group, and
• in the formulae (eg1) and (eg2),
• Leg1 and Leg2 each independently represent an alkanediyl group having 1 to 5 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group in which two or more groups selected from the group consisting of an alkanediyl group having 1 to 5 carbon atoms and an aromatic hydrocarbon group having 6 to 10 carbon atom are linked by a single bond, —O—, —S—, —SO2—, —NH—, —NH—C(O)—, —C(O)—, or —C(O)O—, and
• Reg1 and Reg2 each independently represent a vinyl group or a (meth)acryloyl group, and
• * represents a binding site for a polymer chain.