Ion balance sensor and static elimination system
AssigneeKeyence Corporation
InventorMasaaki KATSURADA
Life of this patent
Estimating the term…
Abstract
To provide an ion balance sensor and a static elimination system capable of grasping further information regarding an environment of a target space in addition to ion balance in the target space. The ion balance sensor includes a detection plate that is conductive and arranged in a target space. In the ion balance sensor, ion balance in the target space is detected based on a potential of the detection plate. An ion balance signal indicating a detection result is generated. Further, a physical quantity related to an environment of the target space is detected in addition to the ion balance. Another signal indicating information regarding the environment of the target space is generated based on a detection result. The ion balance signal and the other signal are output.
Claims19
1-12. (canceled)
An ion balance sensor comprising:
- a detection plate that is conductive and is arranged in a target space;
- a first information generation unit that detects ion balance in the target space based on a potential of the detection plate and generates a first information signal indicating a detection result;
- a second information generation unit that detects a physical quantity related to an environment of the target space and generates a second information signal indicating information regarding the environment of the target space based on a detection result;
- and
- a sensor communication unit that outputs the first information signal and the second information signal,
- wherein the second information generation unit includes a modulation voltage source that generates a modulation voltage having periodicity.
An ion balance sensor comprising:
- a detection plate that is conductive;
- a fixed resistor;
- a modulation voltage source that is electrically connected to a node, electrically connected to the detection plate, via the fixed resistor and generates a modulation voltage having periodicity;
- and
- a potential detection unit that detects a potential of the node over time.
A static elimination system comprising:
- a static eliminator that outputs ions toward a target space where static elimination is to be performed;
- and
- an ion balance sensor connectable to the static eliminator,
- wherein the ion balance sensor includes:
- a detection plate that is conductive and arranged in the target space;
- a fixed resistor;
- a modulation voltage source that is electrically connected to a node, electrically connected to the detection plate, via the fixed resistor and generates a modulation voltage having periodicity;
- a potential detection unit that detects a potential of the node over time;
- an ion amount detection unit that detects an amount of ions flowing in the target space based on a magnitude of an amplitude of a voltage waveform detected by the potential detection unit;
- and
- a sensor communication unit that outputs a signal indicating the amount of the ions detected by the ion amount detection unit to the static eliminator, and
- the static eliminator includes:
- an ion generation unit that generates the ions to be output toward the target space;
- a static eliminator communication unit that receives the signal output from the sensor communication unit of the ion balance sensor;
- and
- an ion control unit that controls the ion generation unit based on the signal received by the static eliminator communication unit.
Dependencies are inferred from the claim text.