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US 2026/0292408 A1Published application
Lithium Niobate MEMS Microphone
AssigneeSilicon Audio, Inc.
InventorsXiaoyu Niu, Neal A. Hall
Life of this patent
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Abstract
A microphone can include a multilayer lithium niobate (LN) diaphragm for use in sensing a lateral in-plane electric field resulting from out-of-plane deformation due to acoustic pressure, e.g., the multilayer LN diaphragm can produce an in-plane electric field when subjected to an out-of-plane pressure or force, e.g., such as acoustic pressure.
Claims20
A microphone, comprising:
- a substrate;
- a multilayer structure comprised of at least two layers of lithium niobate crystal and positioned above an inlet of the substrate;
- and
- at least two electrodes mounted on the multilayer structure on a surface opposite a surface facing the inlet;
- and
- wherein the multilayer structure is configured to generate an electric field from deformation, and wherein the electric field generates an electrical signal at the at least two electrodes.
3 more elements
A microphone package, comprising:
- a first substrate comprising a first inlet;
- a microphone die disposed on the substrate over the first inlet, comprising:
- a second substrate comprising a second inlet positioned over the first inlet;
- a multilayer structure comprised of at least two layers of lithium niobate crystal and positioned above the second inlet of the second substrate;
- and
- at least two electrodes mounted on the multilayer structure on a surface opposite a surface facing the second inlet;
- wherein the multilayer structure is configured to generate an electric field from deformation, and wherein the electric field generates an electrical signal at the at least two electrodes;
- and
- an Application Specific Integrated Circuit (ASIC).
6 more elements
A user equipment device (UE), comprising:
- at least one microphone;
- a memory;
- and
- a processor in communication with the memory and the at least one microphone and configured to digitally processes signals produced from the at least one microphone, and wherein the at least one microphone comprises:
- a substrate;
- a multilayer structure comprised of at least two layers of lithium niobate crystal and positioned above an inlet of the substrate;
- and
- at least two electrodes mounted on the multilayer structure on a surface opposite a surface facing the inlet;
- and
- wherein the multilayer structure is configured to generate an electric field from deformation, and wherein the electric field generates an electrical signal at the at least two electrodes.
7 more elements
Dependencies are inferred from the claim text.