Fluid dispensing system and method
AssigneeASML Netherlands B.V.
InventorsZhuangxiong Huang, Aldo Tralli, Reinier Theodorus Martinus Jilisen, Maarten Anton Gertruda Merkx
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Abstract
A fluid dispensing system including a fluid-permeable surface having a pre-defined permeability to allow permeation of a fluid, and a controller configured to control the rate of permeation of the fluid into a volume by controlling one or both of a pressure of the fluid and an exposed surface area of the fluid-permeable surface. Also provided is a method of controlling the dispensing of a fluid, a plasma-generating apparatus including such a fluid dispensing system as well as the use of such a system, method, or apparatus in a lithographic apparatus or process.
Claims11
-10. (canceled)
A method of controlling the dispensing of a fluid, the method including:
- providing a fluid-permeable surface having a pre-defined permeability,
- providing a fluid in contact with the fluid-permeable surface, and
- controlling one or both of the pressure of the fluid and the exposed surface area of the fluid-permeable surface to control the rate of permeation of the fluid into a volume through the fluid-permeable surface.
-16. (canceled)
Dependencies are inferred from the claim text.