Backup abatement reactor for a processing tool

Abstract

Aspects generally relate to methods and systems for deploying one or more backup abatement reactors for processing chambers to enhance system reliability. The system includes a first processing chamber coupled by a first pre-reactor foreline to a first pre-pump plasma abatement reactor, the first pre-pump plasma abatement reactor coupled by a first post-reactor foreline to a first pump and a backup pre-pump plasma abatement reactor selectively coupling the first processing chamber to the first pump in a manner that prevents gases from being abated by the first pre-pump plasma abatement reactor. One or more first valves are included that have states that control through which of the first pre-pump plasma abatement and the backup pre-pump plasma abatement reactor the first processing chamber is connected to the first pump

Dependencies are inferred from the claim text.