Semiconductor processing equipment and control method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFung-Chih HUANG, Wen-Wei FAN
Life of this patent
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Abstract
A semiconductor processing equipment includes a vacuum chamber, a driving device and a vibration sensor. The vacuum chamber is configured to accommodate a semiconductor substrate, and the driving device is rotatably disposed around the vacuum chamber. The driving device includes a motor, a driving wheel and a first ring gear. The driving wheel is disposed on the rotating shaft of the motor, and the driving wheel is configured to engage the first ring gear to drive the ring gear to rotate. The vibration sensor is disposed on the driving device. The vibration sensor is configured to detect the vibration transmitted to the vibration sensor due to the rotation of at least one of the motor, the driving wheel and the first ring gear.
Claims20
A semiconductor processing equipment, comprising:
- a vacuum chamber for accommodating a semiconductor substrate;
- a driving device rotatably disposed around the vacuum chamber, wherein the driving device comprises a motor, a driving wheel and a first ring gear, the driving wheel is disposed on a rotating shaft of the motor, and the driving wheel is configured to engage the first ring gear to drive the first ring gear to rotate;
- and
- a vibration sensor disposed on the driving device, the vibration sensor is configured to detect a vibration transmitted to the vibration sensor due to a rotation of at least one of the motor, the driving wheel and the first ring gear.
A method for controlling a semiconductor processing equipment, comprising:
- disposing a vibration sensor on a driving device, the driving device comprises a motor, a driving wheel and a first ring gear;
- and
- driving the driving wheel to rotate around a rotation axis of the motor, wherein the driving wheel is configured to engage the first ring gear to drive the first ring gear to rotate, the vibration sensor is configured to detect a vibration transmitted to the vibration sensor due to a rotation of at least one of the motor, the driving wheel and the first ring gear.
A method for controlling a semiconductor processing equipment, comprising:
- forecasting a relationship model between operating parameters of the semiconductor processing equipment and a vibration amplitude of a driving device;
- performing an actual operation with the forecasted parameters of the semiconductor processing equipment to obtain a vibration data of the driving device;
- sending the obtained vibration data to a data analysis unit;
- and
- performing a semiconductor processing when the vibration amplitude is less than a predetermined threshold.
Dependencies are inferred from the claim text.