Back to results
US 2026/0290756 A1Published application
Plug and member for semiconductor manufacturing apparatus
AssigneeNGK Corporation
InventorsTaro USAMI, Tatsuya KUNO
Life of this patent
Estimating the term…
Abstract
A plug of the present invention includes: an insulating and dense plug body; a gas flow path that penetrates from a lower portion of the plug body and opens at an upper surface thereof, and a part of which is exposed on the surface as a recessed portion when viewed from above; and a plug conductive film formed continuously along a wall surface of the recessed portion of the gas flow path and the upper surface of the plug body.
Claims14
A plug comprising:
- an insulating and dense plug body;
- a gas flow path that penetrates from a lower portion of the plug body and opens at an upper surface thereof, and a part of which is exposed on the surface as a recessed portion when viewed from above;
- and
- a plug conductive film formed continuously along a wall surface of the recessed portion of the gas flow path and the upper surface of the plug body.
1 more element
Dependencies are inferred from the claim text.