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US 2026/0290751 A1Published application
Power delivery to a plasma via inductive coupling
AssigneeAES Global Holdings PTE Ltd.
InventorRandy Heckman
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Abstract
A power delivery system comprising a voltage source, an amplifier coupled to a first node and the voltage source, the amplifier comprising a reactive network configured to form a resonant circuit when the first node is coupled to a coil. The power delivery system also comprises an impedance coupled to a second node and a controller configured to control power to the first node by varying the voltage source and control power to the second node by adjusting the impedance.
Claims1
A power delivery system, comprising:
- a voltage source;
- an amplifier coupled to a first node and the voltage source, the amplifier comprising a reactive network configured to form a resonant circuit when the first node is coupled to a coil;
- an impedance coupled to a second node;
- a controller configured to:
- control power to the first node by varying the voltage source;
- and
- control power to the second node by adjusting the impedance.
4 more elements
Dependencies are inferred from the claim text.