Particle beam microscope

A particle beam microscope, comprising:

• a particle beam column, comprising:
• a particle source configured to provide charged particles of a particle beam;
• an acceleration electrode configured to accelerate the particles in the particle beam;
• an objective lens configured to focus the particle beam on a work region outside the particle beam column;
• a first detector configured to output a first detection signal based on particles incident on a first detection area, the first detection area being within the particle beam column between the acceleration electrode and the objective lens, and the first detection area at least partially surrounding a first clearance traversed by the particle beam when the particle beam column is in operation;
• a second detector configured to output a second detection signal based on particles incident on a second detection area, the second detection area being within the particle beam column between the acceleration electrode and the first detection area, and the second detection area at least partially surrounding a second clearance traversed by the particle beam when the particle beam column is in operation;
• and
• an auxiliary lens configured to generate a magnetic field to focus particles that emanate from the work region and pass through the first clearance.