Electron beam irradiation apparatus and contact point conductivity inspection method

A contact point conductivity inspection method comprising:

• applying a retarding potential to a target object placed on a stage via each of a plurality of contact points connected to the target object;
• applying, in a state in which the retarding potential has been applied to the plurality of contact points, an inspection electric potential, to be superimposed on the retarding potential, to at least one contact point of the plurality of contact points;
• detecting, in a state in which the retarding potential has been applied to the plurality of contact points, and, further, the inspection electric potential has been applied, superimposed on the retarding potential, to the at least one contact point, a current flowing through at least one other contact point which is different from the at least one contact point of the plurality of contact points;
• calculating, using a detected current value, a resistance, which is through the target object, between the at least one contact point and the at least one other contact point;
• and
• determining, using the resistance, whether a contact between the target object and either one of the at least one contact point and the at least one other contact point of the plurality of contact points has been damaged, and outputting a result of the determining.