Structure comprising two layers of different electrical nature and its preparation method
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorMessaoud BEDJAOUI
Life of this patent
Estimating the term…
Abstract
A structure comprises a substrate covered by a stack comprising a first layer and a second layer, the first layer being electrically conductive and comprising a first specific chemical element, the second layer being a dielectric layer comprising a second specific chemical element. The structure comprises a first transition zone between the first layer and the second layer. The first transition zone comprises the first specific chemical element and the second specific chemical element. Advantageously, the structure comprises a second transition zone. An assembly is formed by the first transition zone, the second layer, and the second transition zone.
Claims13
A structure, comprising:
- a substrate covered by a stack comprising a first layer and a second layer, the first layer being electrically conductive and comprising a first specific chemical element, the second layer being a dielectric layer or an electrically insulating layer, the second layer comprising a second specific chemical element,
- wherein the structure comprises a first transition zone between the first layer and the second layer, and the first transition zone comprises the first specific chemical element and the second specific chemical element,
- the first specific chemical element is nitrogen and the second specific chemical element is a metal,
- the first layer being is made of a metal nitride and the second layer is made of a metal oxide or made of a metal oxynitride,
- the first transition zone is in contact with the first layer, and
- the second layer has a thickness between 0.1 nm and 3 nm and is devoid of oxygen.
Dependencies are inferred from the claim text.