Stage apparatus, substrate processing apparatus, article manufacturing method, and control method of stage apparatus

Abstract

A stage apparatus includes a substrate chuck configured to support a substrate, a supplier configured to supply a gas to a space between the substrate and the substrate chuck, a pin member configured to support the substrate by protruding from a hole formed in the substrate chuck, a driver configured to relatively move the substrate chuck and the pin member, a detector configured to detect a gap between an end portion of the substrate and the substrate chuck, and a controller configured to control gas supply by the supplier based on a result of detection by the detector in an operation of separating the substrate and the substrate chuck by the driver.

Dependencies are inferred from the claim text.