Method for manufacturing inorganic alignment film, liquid crystal apparatus, and electro-optical apparatus

A liquid crystal apparatus comprising:

• a first substrate including pixel electrodes and a first alignment film disposed on the pixel electrodes;
• a second substrate including a counter electrode and a second alignment film disposed on the counter electrode;
• and
• a liquid crystal layer provided between the first substrate and the second substrate,
• wherein at least one of the first and second substrates includes a first film, a second film provided at a side of the first film that is a side facing the liquid crystal layer, a protective film provided at a side of the second film that is a side facing the liquid crystal layer, and a third film provided at a side of the protective film that is a side facing the liquid crystal layer,
• the first film includes multiple first columns each having a major axis direction being a direction along a normal to the first and second substrates,
• the second film includes multiple second columns each having a major axis direction inclining by a first angle with respect to the direction along the normal, and
• the third film includes multiple third columns each having a major axis direction inclining by a second angle smaller than the first angle with respect to the direction along the normal, the third film being thinner than the second film in the direction along the normal.