Hybrid electro-optic phase shifters
AssigneeGlobalFoundries U.S. Inc.
InventorsStefan Dünkel, Halid Mulaosmanovic, Judson R. Holt, Yusheng Bian
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Abstract
Structures for an electro-optic phase shifter and methods of forming a structure for an electro-optic phase shifter. The structure comprises a waveguide core, a ferroelectric layer that overlaps with a section of the waveguide core, and an interconnect coupled to the ferroelectric layer. The ferroelectric layer comprises a ferroelectric material, and the interconnect is configured to be coupled to a power supply.
Claims20
A structure for an electro-optic phase shifter, the structure comprising:
- a waveguide core including a section;
- a first ferroelectric layer that overlaps with the section of the waveguide core, the first ferroelectric layer comprising a ferroelectric material;
- and
- a first interconnect coupled to the first ferroelectric layer, the first interconnect configured to be coupled to a first power supply.
A method of forming a structure for an electro-optic phase shifter, the method comprising:
- forming a waveguide core;
- forming a ferroelectric layer that overlaps with a section of the waveguide core;
- and
- forming an interconnect coupled to the ferroelectric layer,
- wherein the ferroelectric layer comprises a ferroelectric material, and the interconnect is configured to be coupled to a power supply.
Dependencies are inferred from the claim text.