Wavelength-Tunable Interference Filter

Abstract

A wavelength-tunable interference filter includes a first substrate on which a first mirror is disposed; a movable portion including a second mirror facing the first mirror; a support configured to support the movable portion in a way that the movable portion is movable forward and rearward with respect to the first mirror; an outer peripheral portion configured to hold the movable portion via the support; an actuator configured to change a size of a gap between the first mirror and the second mirror; a detector provided at the support and configured to detect an amount of deformation of the support; and a controller, and the controller is configured to calculate the size of the gap based on the amount of deformation detected by the detector and drive the actuator based on the calculated size of the gap.

Dependencies are inferred from the claim text.