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US 2026/0287877 A1Published application
Light irradiation apparatus, measuring apparatus, observation apparatus, and film thickness measuring apparatus
AssigneeHamamatsu Photonics K.K.
InventorsTomonori NAKAMURA, Satoshi TAKIMOTO
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Abstract
A light irradiation apparatus includes a light source configured to emit light, a light pipe configured to receive, as an input, the light emitted from the light source, and uniformize and output an illuminance distribution of the light, a diffusion plate configured to diffuse the light output from the light pipe, and a light pipe configured to receive, as an input, the light diffused by the diffusion plate, and uniformize and output an illuminance distribution of the light. That is, the light irradiation apparatus includes the two light pipes and the diffusion plate provided to be sandwiched between the two light pipes.
Claims10
1:
- A light irradiation apparatus comprising:
- a light source configured to emit light;
- a first uniformizing optical system configured to receive, as an input, the light emitted from the light source, and uniformize and output an illuminance distribution of the light;
- a diffusion unit configured to diffuse the light output from the first uniformizing optical system;
- and
- a second uniformizing optical system configured to receive, as an input, the light diffused by the diffusion unit, and uniformize and output an illuminance distribution of the light.
3 more elements
2:
- The light irradiation apparatus according to claim 1, wherein
- the first uniformizing optical system is a first light pipe, and
- the second uniformizing optical system is a second light pipe.
3:
- The light irradiation apparatus according to claim 2, wherein a diameter of a light input surface of the second light pipe is the same as a diameter of a light output surface of the first light pipe.
4:
- The light irradiation apparatus according to claim 2, wherein a diameter of a light input surface of the second light pipe is smaller than a diameter of a light output surface of the first light pipe.
5:
- The light irradiation apparatus according to claim 2, wherein a diameter of a light output surface of the second light pipe is larger than a diameter of a light input surface of the second light pipe.
6:
- The light irradiation apparatus according to claim 1, wherein
- the first uniformizing optical system is a first fly-eye lens, and
- the second uniformizing optical system is a second fly-eye lens.
7:
- The light irradiation apparatus according to claim 1, wherein the diffusion unit is a diffusion plate.
8:
- A measuring apparatus comprising:
- the light irradiation apparatus according to claim 1;
- and
- an imager configured to image measurement light generated by light with which a measurement target is irradiated from the light irradiation apparatus.
1 more element
9:
- An observation apparatus comprising:
- the light irradiation apparatus according to claim 1;
- and
- an imager configured to image observation light that is light with which a measurement target is irradiated from the light irradiation apparatus.
1 more element
10:
- A film thickness measuring apparatus comprising:
- the light irradiation apparatus according to claim 1;
- an imager configured to image observation light that is light with which a measurement target is irradiated from the light irradiation apparatus, and output imaging data;
- and
- a film thickness derivation unit configured to derive a film thickness of the measurement target based on the imaging data.
2 more elements