Integrated optical device and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Kai SU, Tzu-Ang Chao
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Abstract
An integrated optical device and method of forming the same are provided. The method includes the following steps. A porous structure is formed by assembling a plurality of bricks, wherein the porous structure includes a continuous hollow portion within a bulk material. A first material having a first refractive index is filled into the continuous hollow portion of the porous structure. The bulk material of the porous structure is replaced with a second material having a second refractive index. The second refractive index is less than the first refractive index.
Claims20
A method, comprising:
- forming a porous structure by assembling a plurality of bricks, wherein the porous structure comprises a continuous hollow portion within a bulk material;
- filling a first material having a first refractive index into the continuous hollow portion of the porous structure;
- and
- replacing the bulk material of the porous structure with a second material having a second refractive index,
- wherein the second refractive index is less than the first refractive index.
A method, comprising:
- providing a first structure comprising a hollow portion within a bulk material, wherein the hollow portion comprises:
- a wavelength dividing channel;
- an input channel connected to one side of the wavelength dividing channel;
- and
- multiple output channels connected to an opposite side of the wavelength dividing channel, wherein the bulk material has a plurality of first connection parts;
- providing a second structure over a substrate, wherein the second structure has a plurality of second connection parts;
- and
- connecting the first structure to the second structure through the plurality of first connection parts and the second connection parts.
A device, comprising:
- a wavelength dividing structure comprising:
- a wavelength dividing body configured to split an input beam into multiple output beams;
- an input waveguide connecting to one side of the wavelength dividing body;
- at least two first output waveguides connecting to an opposite side of the wavelength dividing body;
- and
- at least two second output waveguides connecting to the opposite side of the wavelength dividing body and located above the at least two first output waveguides.
Dependencies are inferred from the claim text.